产品概述: molbox RFM 流量测量主机
- 结构紧凑
- molbloc-L 覆盖的流量量程从 1 sccm 到 100 slm，而 molbloc-S 覆盖的流量上限更是达到了 5000 slm
- 从 20 种不同的气体中选择
- 利用 100:1 可调性实现认证的测量不确定度 ±0.5% 读数
- 内部阀门，可实现内置的清洗、泄漏测试和自重支持
- 包括求和、取平均值、高值/低值及偏差等高级测量函数
- 完善的前面板控制以及 RS232 和 IEEE-488 远程通信
- 利用可由用户设置的参考压力和温度状态，测量质量和体积流量
产品规格: molbox RFM 流量测量主机
流量测量技术指标
molbox RFM 可测量通过 molbloc 流量元件的流量。molbloc-L 的流量量程、可用工作压力和压力差，或者 molbloc-S 的流量量程、绝压量程，取决于所使用的 molbloc 元件和校准选项。请参阅 molbloc-L 和 molbloc-S 量程表，了解校准和量程详情。
molbloc-L 量程最高可达 3E4，可通过微量程选项提高在 10% FS 以下时的分辨率和精确度。对于 1E5-L molbloc，必须使用微量程选项才能达到技术指标。
| molbox RFM | ||
| molbloc-L（量程从 1E1-L 到 3E4-L） | molbloc-S（所有量程） | |
| 测量更新速率 | 1 秒 | 1 秒 |
| 范围 | 到 molbloc 满刻度，取决于气体和 molbloc 压力 取决于校准类型（请参阅 molbloc-L 量程表） | 流量相对于 20 kPa 到 200 kPa 绝压（3 psia 到 30 psia）或 20 kPa 到 200 kPa 绝压（7 psia 到 70 psia）上游 （请参阅 molbloc-S 量程表） |
| 分辨率 | 0.01% FS | ±0.01% 读数 |
| 线性 | ±0.23% 读数，从 10% 到 100% FS ±0.023% FS，在 10% FS 以下 | ±0.25% 读数 |
| 重复性 | ±0.1% 读数，从 10% 到 100% FS ±0.01% FS，在 10% FS 以下 | ±0.1% 读数 |
| 精确度1 | ±0.25% 读数，从 10% 到 100% FS ±0.025% FS，在 10% FS 以下 | ±0.3% 读数 |
| 预测的稳定度2 （一年期） | ±0.15% 读数，从 10% 到 100% FS ±0.015% FS，在 10% FS 以下 | 读数的 ±0.2％ |
| 测量不确定度3 | ±0.5% 读数，从 10% 到 100% FS ±0.05% FS，在 10% FS 以下 | ±0.5% 读数，从 50 kPa 到 500 kPa，±0.5% 流量 @ 50 kPa 从 20 kPa 到 50 kPa |
| 具有微量程选项的 molbox RFM | ||
| molbloc-L（量程从 1E1-L 到 3E4-L） | molbloc-L（量程仅仅是 1E5) | |
| 测量更新速率 | 1 秒 | 1 秒 |
| 范围 | 从 0 到 molbloc 满刻度，取决于气体和 molbloc 压力 取决于校准类型（请参阅 molbloc-L 表格） | 从 0 到 molbloc 满刻度，取决于气体和 molbloc 压力 取决于校准类型（请参阅 molbloc-L 表格） |
| 分辨率 | 0.01% FS，0.001% FS 以下 10% FS | 0.01% FS |
| 线性 | ±0.23% 读数，从 1% 到 100% FS；±0.0023% FS，在 1% FS 以下 | ±0.25% 读数，从 5% 到 100% FS ±0.0125% FS，在 5% FS 以下 |
| 重复性 | ±0.1% 读数，从 1% 到 100% FS ±0.001% FS，在 1% FS 以下 | ±0.2% 读数，从 5% 到 100% FS ±0.01% FS，在 5% FS 以下 |
| 精确度1 | ±0.25% 读数，从 1% 到 100% FS ±0.0025% FS，在 1% FS 以下 | ±0.32% 读数，从 5% 到 100% FS ±0.016% FS，在 5% FS 以下 |
| 预测的稳定度2 （一年期） | ±0.15% 读数，从 1% 到 100% FS ±0.0015% FS，在 1% FS 以下 | ±0.2% 读数，从 5% 到 100% FS ±0.01% FS，在 5% FS 以下 |
| 测量不确定度3 | ±0.5% 读数，从 1% 到 100% FS ±0.005% FS，在 1% FS 以下 | ±0.5% 读数，从 5% 到 100% FS ±0.025% FS，在 5% FS 以下 |
molbloc-S（所有量程）
除了没有微量程以外，其他技术指标与 molbox RFM 相同。只要将 molbox RFM 连接到 molbloc-S 上，就会禁用微量程传感器。
1 精确度：包含线性度、迟滞和可重复性。
2 预测的稳定度：典型 molbox RFM 和 molbloc 在典型环境下使用时一年内从零到范围值的最大变化情况。由于稳定度只能是一种预测，因此应该根据经验建立特定 molbox RFM 的稳定度。
3 测量不确定度：molbox RFM 流量指示相对于通过 molbloc 的流量真值的最大偏差，包括精确度、稳定度和 DHI 校准标准不确定度。molbloc 的测量不确定度技术指标仅适用于使用的是 molbloc 校准过的气体的情况。所有 molbloc 都针对 N2 校准过。其他气体的校准是可选的。并非所有规格的 molbloc 在所有时间，对所有气体都提供 DHI 校准功能。请在订购前检查是否可用。
型号: molbox RFM 流量测量主机
molbox RFM
molbox RFM 参考流量监控器
包含：
用户手册、校准证书、电源线、(2) molbox RFM 到 molbloc 压线、(1) molbox RFM 到 molbloc 数据线、(2) 直通压力快速连接器
用户手册、校准证书、电源线、(2) molbox RFM 到 molbloc 压线、(1) molbox RFM 到 molbloc 数据线、(2) 直通压力快速连接器
5141-100
molbox RFM, molbloc 5E1-L 10 to 100 sccm
Included:
- molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual
- molbloc 5E1-L laminar flow element
- molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L
- Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male
5141-1K
molbox RFM, molbloc 5E2-L 100 to 1,000 sccm
Included:
- molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual
- molbloc 5E2-L laminar flow element
- molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L
- Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male
5141-10K
molbox RFM, molbloc 5E3-L 1 to 10 slm
Included:
- molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual
- molbloc 5E3-L laminar flow element
- molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L
- Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male
5141-50K
molbox RFM, molbloc 3E4-L 5 to 50 slm
Included:
- molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual
- molbloc 3E4-L laminar flow element
- molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L
- Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male
5142-1K
molbox RFM-M, molbloc 5E2-L 10 to 1,000 sccm
Included:
- molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual
- molbloc 5E2-L laminar flow element
- molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L
- Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male
5142-10K
molbox RFM-M, molbloc 5E3-L 0.1 to 10 slm
Included:
- molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual
- molbloc 5E3-L laminar flow element
- molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L
- Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male
5142-50K
molbox RFM-M, molbloc 3E4-L 0.5 to 50 slm
Included:
- molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual
- molbloc 3E4-L laminar flow element
- molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L
- Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male
5144-50K
molbox RFM-M, molblocs 5E2-L and 3E4-L10 sccm to 50 slm
Included:
- molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual
- molbloc 5E2-L and 3E4-L laminar flow elements
- molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L
- Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male
